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Volumn 33, Issue 5 PART 1, 1997, Pages 3106-3108
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Evaluation of amorphous carbon nitride thin film for magnetic rigid thin film disk by ir spectroscopy
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Author keywords
[No Author keywords available]
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Indexed keywords
INFRARED SPECTROSCOPY;
MAGNETIC DISK STORAGE;
MAGNETIC FILM STORAGE;
NITRIDES;
SPUTTERING;
THIN FILMS;
CARBON NITRIDE;
AMORPHOUS FILMS;
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EID: 0031220036
PISSN: 00189464
EISSN: None
Source Type: Journal
DOI: 10.1109/20.617859 Document Type: Article |
Times cited : (4)
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References (5)
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