Selective oxidized porous silicon(SOPS) substrate for microwave power chip-packaging

IEEE Topical Meeting on Electrical Performance of Electronic Packaging

Volumn , Issue , 1996, Pages 202-204

  Nam, Choong Mo ^a   Kwon, Young Se ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ANODIC OXIDATION; COSTS; ELECTRONICS PACKAGING; ENERGY DISSIPATION; MICROWAVE DEVICES; MICROWAVES; OXIDATION; PERFORMANCE; SUBSTRATES; THERMAL CONDUCTIVITY;

ANODIZATION; POWER CHIP PACKAGING; SELECTIVE OXIDIZED POROUS SILICON;

POROUS SILICON;

EID: 0030405948     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)