Ion densities in a high-intensity, low flow nitrogen-argon plasma

Physics of Plasmas

Volumn 4, Issue 8, 1997, Pages 3077-3081

  Brussaard, G J H ^a   Van De Sanden, M C M ^a   Schram, D C ^a  

^a EINDHOVEN UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

CARRIER CONCENTRATION; IONS; PLASMA PROBES; PLASMAS;

ARGON PLASMA; CASCADED ARC PLASMA; ION DENSITIES; LANGMUIR PROBE MEASUREMENTS; NITROGEN PLASMA; PLANAR PROBE;

PLASMA DENSITY;

EID: 0031210554     PISSN: 1070664X     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.872442     Document Type: Article

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