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Volumn 7, Issue 5, 1997, Pages 465-478

Modeling and control of a micro-positioning tower

Author keywords

[No Author keywords available]

Indexed keywords

CLOSED LOOP CONTROL SYSTEMS; CONTROL EQUIPMENT; CONTROL SYSTEM ANALYSIS; CONTROL SYSTEM SYNTHESIS; DEGREES OF FREEDOM (MECHANICS); FREQUENCY RESPONSE; LOW PASS FILTERS; POSITION CONTROL; THREE TERM CONTROL SYSTEMS; VIBRATION CONTROL;

EID: 0031210156     PISSN: 09574158     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0957-4158(97)00016-0     Document Type: Article
Times cited : (22)

References (11)
  • 1
    • 0029755070 scopus 로고    scopus 로고
    • Design and characterization of a low-profile micro-positioning stage
    • Yang, R., Jouaneh, M. and Schweizer, R., Design and characterization of a low-profile micro-positioning stage. Precision Engineering, 1996, 18, 20-29.
    • (1996) Precision Engineering , vol.18 , pp. 20-29
    • Yang, R.1    Jouaneh, M.2    Schweizer, R.3
  • 2
    • 0025724172 scopus 로고
    • An active air journal bearing with ultraprecision, infinite static stiffness, high damping capability and new functions
    • Shimokohbe, A., Horikawa, O. and Sato, K., An active air journal bearing with ultraprecision, infinite static stiffness, high damping capability and new functions. Annals of the CIRP, 1991, 40, 563-566.
    • (1991) Annals of the CIRP , vol.40 , pp. 563-566
    • Shimokohbe, A.1    Horikawa, O.2    Sato, K.3
  • 5
    • 0006710596 scopus 로고
    • Positioning table with high accuracy and high speed
    • Yonezawa, H., Hirata, Y. and Sasai, H., Positioning table with high accuracy and high speed. Annals of the CIRP, 1990, 39, 433-436.
    • (1990) Annals of the CIRP , vol.39 , pp. 433-436
    • Yonezawa, H.1    Hirata, Y.2    Sasai, H.3
  • 7
    • 0025457932 scopus 로고
    • A micro-positioning tool post using a piezoelectric actuator for diamond turning machines
    • Okazaki, Y., A micro-positioning tool post using a piezoelectric actuator for diamond turning machines. Precision Engineering, 1990, 12, 151-156.
    • (1990) Precision Engineering , vol.12 , pp. 151-156
    • Okazaki, Y.1
  • 8
    • 0023565624 scopus 로고
    • More analysis and experimentation on a macro/micro manipulator system
    • Boston, MA, December
    • Sharon, A., Hogan, N. and Hardt, D., More analysis and experimentation on a macro/micro manipulator system. The Winter Annual Meeting of the ASME, Boston, MA, December 1987, pp. 417-422.
    • (1987) The Winter Annual Meeting of the ASME , pp. 417-422
    • Sharon, A.1    Hogan, N.2    Hardt, D.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.