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Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 36, Issue 3 SUPPL. A, 1997, Pages 1268-1273

Characteristics of 1-MHz discharges in SF6/Ar and CF4/Ar mixtures in a parallel-plate system

(5) Aoyagi, Kenji a Ishikawa, Itsuo a Kusunoki, Hideki a Saito, Yukinori a Suganomata, Shinji a

Author keywords

1 MHZ discharge; CF4 Ar; Electrical properties; Electron temperature; Saturation ion current; SF6 Ar; Spatiotemporal profile of optical emission; Synergism

Indexed keywords

ELECTRON TEMPERATURE; SATURATION ION CURRENT;

ARGON; BINARY MIXTURES; COMPOSITION EFFECTS; ELECTRIC IMPEDANCE MEASUREMENT; EMISSION SPECTROSCOPY; FLUOROCARBONS; PLASMA DENSITY; SULFUR COMPOUNDS;

ELECTRIC DISCHARGES;

EID: 0031102608 PISSN: 00214922 EISSN: None Source Type: Journal
DOI: 10.1143/jjap.36.1268 Document Type: Article

Times cited : (8)

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