Controlled two-step solid-phase crystallization for high-performance polysilicon TFT's

IEEE Electron Device Letters

Volumn 18, Issue 8, 1997, Pages 378-381

  Subramanian, Vivek ^a   Dankoski, Paul ^a   Degertekin, Levent ^a   Khuri Yakub, Butrus T ^a   Saraswat, Krishna C ^a  

^a Stanford University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC TRANSDUCERS; ANNEALING; CRYSTALLIZATION; GRAIN GROWTH; NUCLEATION; SEMICONDUCTING SILICON; SEMICONDUCTOR DEVICE MANUFACTURE;

SOLID PHASE CRYSTALLIZATION;

THIN FILM TRANSISTORS;

EID: 0031207513     PISSN: 07413106     EISSN: None     Source Type: Journal    
DOI: 10.1109/55.605445     Document Type: Article

References (13)

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