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Thin Solid Films

Volumn 305, Issue 1-2, 1997, Pages 227-231

Growth of (211) BaTiO3 thin films on Pt-coated Si( 100) substrates by radio frequency magnetron sputtering

(5) Su, Q X b Rabson, T A a,b Robert, M a,b Xiong, J X Z c Moss, S C c

a RICE UNIVERSITY (United States)

b Rice University (United States)

c University of Houston (United States)

Author keywords

Barium oxide; Deposition process; Sputtering; X ray diffraction

Indexed keywords

BARIUM TITANATE; CRYSTAL LATTICES; CRYSTAL ORIENTATION; FILM GROWTH; MAGNETRON SPUTTERING; PEROVSKITE; PLATINUM; SEMICONDUCTING SILICON; SUBSTRATES; X RAY CRYSTALLOGRAPHY;

FULL WIDTH AT HALF MAXIMUM (FWHM);

DIELECTRIC FILMS;

EID: 0031207305 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/S0040-6090(97)00140-5 Document Type: Article

Times cited : (6)

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