Polarized reflectance spectroscopy and spectroscopic ellipsometry determination of the optical anisotropy of gallium nitride on sapphire

Japanese Journal of Applied Physics, Part 2: Letters

Volumn 36, Issue 8 PART A, 1997, Pages

  Yu, Guolin ^a   Ishikawa, Hiroyasu ^a   Egawa, Takashi ^a   Soga, Tetsuo ^a   Watanabe, Junji ^a   Jimbo, Takashi ^a   Umeno, Masayoshi ^a  

^a NAGOYA INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

GaN; Optical anisotropy; Refractive index; Spectroscopic ellipsometry

Indexed keywords

ANISOTROPY; COMPUTATIONAL METHODS; ELLIPSOMETRY; LIGHT POLARIZATION; PERMITTIVITY; REFRACTIVE INDEX; SAPPHIRE; SEMICONDUCTING FILMS; SPECTROSCOPIC ANALYSIS;

GALLIUM NITRIDE; POLARIZED REFLECTANCE SPECTROSCOPY;

SEMICONDUCTING GALLIUM COMPOUNDS;

EID: 0031200689     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.36.l1029     Document Type: Article

References (14)

1. S. Nakamura, M. Senoh and T. Mukai: Jpn. J. Appl. Phys. 32 (1993) L8.
2. S. Nakamura, M. Senoh, S. Nagahama, N. Iwasa, T. Yamada, T. Matsushita, H. Kiyoku and Y. Sugimoto: Jpn. J. Appl. Phys. 35 (1996) L217.
3. E. Ejder: Phys. Status Solidi A6 (1971) 445.
4. S. Logothetidis, J. Petalas, M. Cardona and T. D. Moustakas: Phys. Rev. B 50 (1994) 18 017.
5. G. Yu, T. Soga, T. Jimbo and M. Umeno: Jpn. J. Appl. Phys. 34 (1995) 530.
6. D. den Engelsen: J. Opt. Soc. Am. 61 (1971) 1460.
7. F. Meyer, E. E. de Kluizenaar and D. den Engelsen: J. Opt. Soc. Am. 63 (1973) 529.
8. S. Ninomiya and S. Adachi: Jpn. J. Appl. Phys. 33 (1994) 2479.
9. H. Amano, N. Watanabe, N. Koide and I. Akasaki: Jpn. J. Appl. Phys. 32 (1993) L1000.
10. I. Akasaki and H. Amano: Mater. Res. Soc. Symp. Proc. 339 (1994) 443.
11. D. T. F. Marple: J. Appl. Phys. 35 (1964) 539.
12. L. Patrick and W. J. Choyke: Phys. Rev. B 2 (1970) 2255.
13. S. Strite and H. Morkoc: J. Vac. Sci. & Technol. B 10 (1992) 1237.
14. S. Fischer, C. Wetzel, E. E. Haller and B. K. Meyer: Appl. Phys. Lett. 67 (1995) 1298.