Surface morphology and quantum dot self-assembly in growth of strained-layer semiconducting films

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 15, Issue 4, 1997, Pages 1051-1055

  Khor, K E ^a   Das Sarma, S ^a  

^a Bldg 142   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CALCULATIONS; COMPUTER SIMULATION; EPITAXIAL GROWTH; MOLECULAR DYNAMICS; MORPHOLOGY; SEMICONDUCTING GALLIUM ARSENIDE; SEMICONDUCTING INDIUM COMPOUNDS; SEMICONDUCTOR DEVICE STRUCTURES; SEMICONDUCTOR QUANTUM DOTS; SUBSTRATES; SURFACES;

ATOMIC FORCE MICROGRAPH; STRAINED HETEROEPITAXIAL GROWTH;

SEMICONDUCTING FILMS;

EID: 0031191890     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.589391     Document Type: Article

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