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Volumn 80, Issue 7, 1997, Pages 1663-1667

Nanostructuring of laser-deposited Ti films by self-limited oxidation

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; CHEMICAL REACTIONS; CRYSTAL STRUCTURE; DEPOSITION; GLASS; LASER APPLICATIONS; LIGHT ABSORPTION; OXIDATION; SCANNING; TITANIUM;

EID: 0031190427     PISSN: 00027820     EISSN: None     Source Type: Journal    
DOI: 10.1111/j.1151-2916.1997.tb03035.x     Document Type: Article
Times cited : (9)

References (17)
  • 3
    • 4043068253 scopus 로고
    • An Influence of Interference Effects in Oxide Films on Dynamics of Heating of Metals by the Laser Radiation
    • M. I. Arzuov, A. I. Barchukov, F. V. Bunkin, N. A. Kirichenko, V. I. Konov, and B. S. Lukyanchuk, "An Influence of Interference Effects in Oxide Films on Dynamics of Heating of Metals by the Laser Radiation" (in Russ.), Quantovaja Electronika, 6, [3] 466-72 (1979).
    • (1979) Quantovaja Electronika , vol.6 , Issue.3 , pp. 466-472
    • Arzuov, M.I.1    Barchukov, A.I.2    Bunkin, F.V.3    Kirichenko, N.A.4    Konov, V.I.5    Lukyanchuk, B.S.6
  • 4
    • 4043089585 scopus 로고
    • Laser Activation of Oxidizing Reactions at the Metal Surface
    • N. A. Kirichenko and B. S. Luk'yanchuk, "Laser Activation of Oxidizing Reactions at the Metal Surface' (in Russ.), Quantovaja Electronika, 10 [4] 819-25 (1983).
    • (1983) Quantovaja Electronika , vol.10 , Issue.4 , pp. 819-825
    • Kirichenko, N.A.1    Luk'yanchuk, B.S.2
  • 5
    • 0004142850 scopus 로고
    • Sources, Optics, and Laser Microfabrication Systems for Direct Writing and Projection Lithography
    • Edited by D. J. Ehrlich and J. Y. Tsao. Academic Press, London, U.K.
    • Y. S. Liu, "Sources, Optics, and Laser Microfabrication Systems for Direct Writing and Projection Lithography"; pp. 3-84 in Laser Microfabrication. Thin Film Process and Lithography. Edited by D. J. Ehrlich and J. Y. Tsao. Academic Press, London, U.K., 1989.
    • (1989) Laser Microfabrication. Thin Film Process and Lithography , pp. 3-84
    • Liu, Y.S.1
  • 6
    • 0021198098 scopus 로고
    • Nonreciprocal Laser-Microchemical Processing: Spatial Resolution Limits and Demonstration of 0.2 μm Linewidth
    • D. J. Ehrlich and J. Y. Tsao, "Nonreciprocal Laser-Microchemical Processing: Spatial Resolution Limits and Demonstration of 0.2 μm Linewidth," Appl. Phys. Lett., 44 [2] 267-69 (1984).
    • (1984) Appl. Phys. Lett. , vol.44 , Issue.2 , pp. 267-269
    • Ehrlich, D.J.1    Tsao, J.Y.2
  • 8
    • 0029304732 scopus 로고
    • Silicon Nanostructures Produced by Laser Direct Writing
    • M. Müllenborn, H. Dirac, and I. W. Petersen, "Silicon Nanostructures Produced by Laser Direct Writing," Appl. Phys. Lett., 66 [22] 3001-3003 (1995).
    • (1995) Appl. Phys. Lett. , vol.66 , Issue.22 , pp. 3001-3003
    • Müllenborn, M.1    Dirac, H.2    Petersen, I.W.3
  • 9
    • 0030569184 scopus 로고    scopus 로고
    • Lateral Self-Limitation in the Laser-Induced Oxidation of Ultrathin Metal Films
    • A. A. Gorbunov, H. Eichler, W. Pompe, and B. Huey, "Lateral Self-Limitation in the Laser-Induced Oxidation of Ultrathin Metal Films," Appl. Phys. Lett., 69 [19] 2816-18 (1996).
    • (1996) Appl. Phys. Lett. , vol.69 , Issue.19 , pp. 2816-2818
    • Gorbunov, A.A.1    Eichler, H.2    Pompe, W.3    Huey, B.4
  • 10
    • 4043126477 scopus 로고    scopus 로고
    • Carl Zeiss Jena GmbH, private communication
    • U. Simon, Carl Zeiss Jena GmbH, private communication.
    • Simon, U.1
  • 12
    • 0003972070 scopus 로고
    • Sect. 13.4.1. Pergamon Press, London, U.K.
    • M. Born and E. Wolf, Principles of Optics; Sect. 13.4.1. Pergamon Press, London, U.K., 1993.
    • (1993) Principles of Optics
    • Born, M.1    Wolf, E.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.