Crystallographic orientation and morphology of epitaxial In2O3 thin films grown on MgO(001) single crystal substrates

Thin Solid Films

Volumn 303, Issue 1-2, 1997, Pages 218-221

  Sieber, H ^a   Senz, St ^a   Hesse, D ^a  

^a Max Planck Inst M   (Germany)

Author keywords

Epitaxial thin films; Film morphology; In2O3; MgO; Transmission electron microscopy; X ray diffraction

Indexed keywords

CRYSTAL ORIENTATION; ELECTRON BEAMS; EPITAXIAL GROWTH; EVAPORATION; FILM GROWTH; HIGH TEMPERATURE EFFECTS; INDIUM COMPOUNDS; MAGNESIA; MORPHOLOGY; SINGLE CRYSTALS; SURFACE STRUCTURE; THIN FILMS;

ELECTRON BEAM EVAPORATION; INDIUM OXIDE;

OPTICAL FILMS;

EID: 0031187753     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0040-6090(97)00139-9     Document Type: Article

References (13)

1. K.L. Chopra, S. Major, D.K., Pandya, A. Bielanski, Thin Solid Films 102 (1983) 1.
2. J.C.C. Fan, Thin Solid Films 80 (1981) 125.
3. E.J. Tarsa, J.H. English, J.S. Speck, Appl. Phys. Lett. 62 (1993) 2332.
4. M. Kamei, Y. Shigesato, S. Takaki, Thin Solid Films 259 (1995) 38.
5. N. Taga, H. Odaka, Y. Shigesato, I. Yasui, M. Kamai, T.E. Haynes, J. Appl. Phys. 80 (1996) 978.
6. N. Ueda, T. Omata, N. Hikuma, K. Ueda, H. Mizoguchi, T. Hashimoto, H. Kawazoe, Appl. Phys. Lett. 61 (1992) 1954.
7. H. Un'no, N. Hikuma, T. Omata, N. Ueda, T. Hashimoto and H. Kawazoe, Jpn. J. Appl. Phys. (Part 2), 32 (1993) L1260.
8. D. Hesse, H. Sieber, P. Werner, R. Hillebrand, J. Heydenreich, Z. Phys. Chem. 187 (1994) 161.
9. H. Sieber, P. Werner and D. Hesse, Phil. Mag. A75 (1997)7889.
10. L.I. Maissel and R. Clang, Handbook of Thin Film Technology, McGraw-Hill (1970).
11. R.H. Lamoreaux, D.L. Hildenbrand, L. Brewer, J. Phys. Chem. Ref. Data 16 (1987) 419.
12. ICDD PDF-2 Data base, JCPDS-Int. Center for Diffraction Data, Pennsylvania, USA (1994).
13. A.P. Sutton and R.W. Balluffi, Interfaces in Crystalline Materials, Clarendon Press, Oxford (1995).