Simulation for the microcrystalline silicon thin film transistors by considering the change of acceptor-like state and microcrystal grain size effect

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 36, Issue 7 A, 1997, Pages 4246-4250

  Jenq, Fenq Lin ^a   Chen, Jiann Ruey ^a   Chen, Bor Yir ^b   Yeh, Fon Shan ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

^b NATIONAL FORMOSA UNIVERSITY   (Taiwan)

Author keywords

Acceptor like state; Grain size; Microcrystalline silicon; Simulation; TFT

Indexed keywords

ACCEPTOR LIKE STATE; MICROCRYSTALLINE SILICON; POISSON EQUATION;

AMORPHOUS SILICON; COMPUTER SIMULATION; ENERGY GAP; GRAIN SIZE AND SHAPE; MATHEMATICAL MODELS;

THIN FILM TRANSISTORS;

EID: 0031185990     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.36.4246     Document Type: Article

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