Influence of discharge geometry on power dissipation and sheath impedances in silane discharges

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 36, Issue 7 SUPPL. B, 1997, Pages 4717-4721

  Spiliopoulos, Nikos ^a   Mataras, Dimitris ^a   Rapakoulias, Dimitris ^a  

^a UNIVERSITY OF PATRAS   (Greece)

Author keywords

Geometry; Glow discharge; Plasma potential; Power; Sheath impedance

Indexed keywords

COMPUTATIONAL METHODS; ELECTRIC IMPEDANCE; GROUNDING ELECTRODES; PLASMA SHEATHS; PRESSURE EFFECTS; SILANES;

DISCHARGE GEOMETRY;

GLOW DISCHARGES;

EID: 0031177142     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.36.4717     Document Type: Article

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