Micromechanical ultrasonic liquid nebulizer

Sensors and Actuators, A: Physical

Volumn 62, Issue 1-3, 1997, Pages 765-767

  Paneva, Roumiana ^a,c,d   Temmel, G ^b   Burte, E ^b   Ryssel, H ^a,b  

^a UNIVERSITY OF ERLANGEN NUREMBERG   (Germany)

^b FRAUNHOFER INSTITUTE FOR INTEGRATED CIRCUITS IIS   (Germany)

^c Institute of Microelectronics ^*  (Bulgaria)

^d Institute of Microelectronics   (Bulgaria)

Author keywords

Micromechanics; Piezoelectricity; Ultrasonic nebulization

Indexed keywords

MEDICAL APPLICATIONS; MEMBRANES; PIEZOELECTRIC MATERIALS; SILICON WAFERS; ULTRASONIC DEVICES; VIBRATIONS (MECHANICAL); ZINC OXIDE;

MICROMECHANICAL ULTRASONIC LIQUID NEBULIZER;

MICROELECTROMECHANICAL DEVICES;

EID: 0031177095     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(97)01580-X     Document Type: Article

References (9)

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