Surface acoustic wave atomizer with pumping effect

Proceedings of the IEEE Micro Electro Mechanical Systems

Volumn , Issue , 1995, Pages 25-30

  Kurosawa, Minoru ^a   Watanabe, Takayuki ^a   Higuchi, Toshiro ^a  

^a UNIVERSITY OF TOKYO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC WAVES; ATOMIZATION; ATOMIZERS; ENDOSCOPY; SURFACE WAVES; ULTRASONIC DEVICES; VIBRATORS; VISCOSITY OF LIQUIDS;

ATOMIZING EFFECT; MINIATURIZATION; NEBULIZERS; PUMPING EFFECT; RAYLEIGH WAVE; ULTRASONIC ATOMIZERS; ULTRASONIC VIBRATION;

ACOUSTIC SURFACE WAVE DEVICES;

EID: 0029205559     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)