Circuit simulation model of gas damping in microstructures with nontrivial geometries

International Conference on Solid-State Sensors and Actuators, and Eurosensors IX, Proceedings

Volumn 2, Issue , 1995, Pages 36-39

  Veijola, Timo ^a   Ryhanen, Tapani ^a   Kuisma, Heikki ^a   Lahdenpera, Juha ^a  

^a AALTO UNIVERSITY   (Finland)

Author keywords

[No Author keywords available]

Indexed keywords

ACCELEROMETERS; BOUNDARY CONDITIONS; CAPACITANCE; COMPUTER SIMULATION; DAMPING; ELECTRIC NETWORK ANALYSIS; ELECTRIC NETWORK TOPOLOGY; FINITE DIFFERENCE METHOD; FLOW OF FLUIDS; MATHEMATICAL MODELS; PARTIAL DIFFERENTIAL EQUATIONS; THIN FILMS;

CIRCUIT SIMULATION MODEL; GAS DAMPING; MESH TOPOLOGIES; MICROMECHANICAL STRUCTURE; SILICON ACCELEROMETERS;

MICROELECTROMECHANICAL DEVICES;

EID: 0029489460     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (11)