Electron attachment mass spectrometry for the detection of electronegative species in a plasma

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 36, Issue 7 SUPPL. B, 1997, Pages 4638-4643

  Stoffels, Winfred Willem ^a,b   Stoffels, Eva ^a   Tachibana, Kunihide ^a  

^a KYOTO UNIVERSITY   (Japan)

^b EINDHOVEN UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

Electron attachment; Mass spectrometry; Radio frequency plasma

Indexed keywords

ELECTRIC DISCHARGES; ELECTRON SOURCES; FLUOROCARBONS; IONS; MASS SPECTROMETRY; PARTICLE DETECTORS;

ELECTRON ATTACHMENT MASS SPECTROMETRY; ELECTRONEGATIVITY;

PLASMAS;

EID: 0031176056     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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