Colour sensors based on active interference filters using silicon-compatible materials

Sensors and Actuators, A: Physical

Volumn 62, Issue 1-3, 1997, Pages 513-523

  Poenar, D P ^a,b   French, P J ^a   Wolffenbuttel, R F ^a,c  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b INSTITUTE OF MICROELECTRONICS   (Singapore)

^c UNIVERSITY OF MICHIGAN   (United States)

Author keywords

Colour sensors; Interference filters; Polysilicon diodes; Silicon compatible materials

Indexed keywords

COLOR; DIELECTRIC MATERIALS; LIGHT INTERFERENCE; OPTICAL FILTERS; OPTICAL PROPERTIES; PHOTODETECTORS; PHOTODIODES; POLYCRYSTALLINE MATERIALS; SILICON SENSORS; THIN FILM DEVICES;

COLOR SENSORS; INTERFERENCE FILTERS; POLYSILICON DIODES;

OPTICAL SENSORS;

EID: 0031175774     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(97)01600-2     Document Type: Article

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