GeO desorption in reactive scattering of an oxygen molecular beam with a Ge(100) surface

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 36, Issue 6 A, 1997, Pages 3469-3473

  Kamioka, Isao ^a,b   Kitajima, Masahiro ^a   Kawabe, Takaya ^a,b   Nakamura, Kazutaka G ^a  

^a NATIONAL INSTITUTE FOR MATERIALS SCIENCE   (Japan)

^b UNIVERSITY OF TSUKUBA   (Japan)

Author keywords

Dynamics; Germanium; Kinetics; Oxygen molecular beam; REMPI; Thermal oxidation

Indexed keywords

GERMANIUM OXIDE; REACTIVE SCATTERING; RESONANCE ENHANCED MULTIPHOTON IONIZATION; TRANSITION STATE THEORY;

CALCULATIONS; DESORPTION; LIGHT SCATTERING; MOLECULAR BEAMS; MOLECULAR VIBRATIONS; MOLECULES; OXYGEN; REACTION KINETICS; SEMICONDUCTING GERMANIUM; SURFACES;

SEMICONDUCTING GERMANIUM COMPOUNDS;

EID: 0031169676     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.36.3469     Document Type: Article

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