Ultrasound barrier based on packaged micromachined membrane resonators

Proceedings of the IEEE Micro Electro Mechanical Systems

Volumn , Issue , 1995, Pages 334-339

  Hornung, M ^a   Frey, R ^a   Brand, O ^a   Baltes, H ^a   Hafner, C ^a  

^a ETH ZURICH   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

BIPOLAR INTEGRATED CIRCUITS; COST EFFECTIVENESS; ELECTRONICS PACKAGING; ETCHING; MEMBRANES; OPTIMIZATION; RESONATORS; SEMICONDUCTING SILICON; TECHNOLOGY; TRANSDUCERS;

ELECTROTHERMAL EXCITATION; MICROMACHINED MEMBRANE RESONATORS; PIEZORESISTIVE DETECTION; POST PROCESSING ETCHING; ULTRASOUND BARRIER; ULTRASOUND PROXIMITY SENSORS;

PROXIMITY SENSORS;

EID: 0029180967     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)