CVD synthesis and SNMS characterization of thin films of ABO3 perovskite-type materials (PbTio3, La(Sr)CoO3, La(Sr)Mno3, LaNiO3)

Thin Solid Films

Volumn 302, Issue 1-2, 1997, Pages 140-146

  Rebane, Jan A ^a,b   Gorbenko, Oleg Yu ^a   Suslov, Stanislav G ^a   Yakovlev, Nikolay V ^a   Korsakov, Igor E ^a   Amelichev, Vadim A ^a   Tretyakov, Yury D ^a  

^a MOSCOW STATE UNIVERSITY   (Russian Federation)

^b TRINITY COLLEGE   (United Kingdom)

Author keywords

Depth profiling; Diffusion; Organometallic vapour deposition; Oxides

Indexed keywords

COMPOSITION EFFECTS; DIFFUSION IN SOLIDS; HETEROJUNCTIONS; HIGH TEMPERATURE EFFECTS; MASS SPECTROMETRY; METALLORGANIC CHEMICAL VAPOR DEPOSITION; OXIDATION; OXIDES; PEROVSKITE; PRESSURE EFFECTS; SUBSTRATES; THIN FILMS;

CATALYTIC OXIDATION; DEPTH PROFILING; SECONDARY NEUTRAL MASS SPECTROMETRY (SNMS);

SEMICONDUCTING FILMS;

EID: 0031163270     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(96)09585-5     Document Type: Article

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