Large area uniform deposition of YBa2Cu3O7 thin films by a 90° off-axis sputtering technique

Materials Research Society Symposium - Proceedings

Volumn 401, Issue , 1996, Pages 423-428

  Rao, R A ^a   Gan, Q ^a   Eom, C B ^a  

^a DUKE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITION; DEPOSITION; HIGH TEMPERATURE SUPERCONDUCTORS; SPUTTERING; SUBSTRATES; SUPERCONDUCTING TRANSITION TEMPERATURE; SUPERCONDUCTIVITY;

LARGE AREA UNIFORM DEPOSITION; OFF AXIS SPUTTERING TECHNIQUE; YTTRIUM BARIUM CUPRATE;

SUPERCONDUCTING FILMS;

EID: 0029778455     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (19)