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Volumn 18, Issue 5, 1997, Pages 206-208

Experimental determination of threshold voltage shifts due to quantum mechanical effects in MOS electron and hole inversion layers

Author keywords

[No Author keywords available]

Indexed keywords

OXIDES; QUANTUM THEORY; SEMICONDUCTOR DEVICE MODELS; SEMICONDUCTOR DOPING;

EID: 0031146748     PISSN: 07413106     EISSN: None     Source Type: Journal    
DOI: 10.1109/55.568765     Document Type: Article
Times cited : (79)

References (12)
  • 1
    • 0001156050 scopus 로고
    • Self-consistent results for n-type Si inversion layers
    • F. Stern, "Self-consistent results for n-type Si inversion layers," Phys. Rev. B, vol. 5, no. 12, p. 4891, 1972.
    • (1972) Phys. Rev. B , vol.5 , Issue.12 , pp. 4891
    • Stern, F.1
  • 2
    • 85032069152 scopus 로고
    • Electronic properties of two-dimensional systems
    • T. Ando, A. B. Fowler, and F. Stern, "Electronic properties of two-dimensional systems," Rev. Mod. Phys., vol. 54, no. 2, p. 437, 1982.
    • (1982) Rev. Mod. Phys. , vol.54 , Issue.2 , pp. 437
    • Ando, T.1    Fowler, A.B.2    Stern, F.3
  • 3
    • 0028396643 scopus 로고
    • A simple model for quantization effects in heavily-doped silicon MOSFETs at inversion conditions
    • M. J. van Dort, P. H. Woerlee, and A. J. Walker, "A simple model for quantization effects in heavily-doped silicon MOSFETs at inversion conditions," Solid-State Electron., vol. 37, no. 3, pp. 411-414, 1994.
    • (1994) Solid-State Electron. , vol.37 , Issue.3 , pp. 411-414
    • Van Dort, M.J.1    Woerlee, P.H.2    Walker, A.J.3
  • 4
    • 0025682843 scopus 로고
    • Quantum effects in Si n-MOS inversion layer at high substrate concentration
    • Y. Ohkura, "Quantum effects in Si n-MOS inversion layer at high substrate concentration," Solid-State Electron., vol. 33, no. 12, p. 1581, 1990.
    • (1990) Solid-State Electron. , vol.33 , Issue.12 , pp. 1581
    • Ohkura, Y.1
  • 5
    • 0000737464 scopus 로고
    • Self-consistent calculation of electron and hole inversion charges at silicon-silicon dioxide interfaces
    • C. Moglestue, "Self-consistent calculation of electron and hole inversion charges at silicon-silicon dioxide interfaces," J. Appl. Phys., vol. 59, no. 9, p. 3175, 1986.
    • (1986) J. Appl. Phys. , vol.59 , Issue.9 , pp. 3175
    • Moglestue, C.1
  • 6
    • 0026852922 scopus 로고
    • Influence of high substrate doping levels on the threshold voltage and the mobility of deep-submicrometer MOSFET's
    • April
    • M. J. van Dort, P. H. Woerlee, A. J. Walker, C. A. H. Juffermans, and H. Lifka, "Influence of high substrate doping levels on the threshold voltage and the mobility of deep-submicrometer MOSFET's," IEEE Trans. Electron Devices, vol. 39, April 1992.
    • (1992) IEEE Trans. Electron Devices , vol.39
    • Van Dort, M.J.1    Woerlee, P.H.2    Walker, A.J.3    Juffermans, C.A.H.4    Lifka, H.5
  • 9
    • 0029476620 scopus 로고
    • Surface SIMS, secondary ion mass spectrometry using oxygen flooding: A powerful tool for monitoring surface metal contamination on silicon wafers
    • Pittsburgh, PA
    • S. P. Smith, L. Wang, J. W. Erickson, and V. K. F. Chia, "Surface SIMS, secondary ion mass spectrometry using oxygen flooding: A powerful tool for monitoring surface metal contamination on silicon wafers," in Proc. Mat. Res. Soc. Symp., Pittsburgh, PA, 1995, vol. 386, pp. 157-162.
    • (1995) Proc. Mat. Res. Soc. Symp. , vol.386 , pp. 157-162
    • Smith, S.P.1    Wang, L.2    Erickson, J.W.3    Chia, V.K.F.4


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.