Benchmarking semiconductor manufacturing performance using a pairwise-comparison method

IEEE Transactions on Semiconductor Manufacturing

Volumn 10, Issue 2, 1997, Pages 317-321

  Sattler, Linda ^a   Glassey, C Roger ^b   Saeed, Baruch I ^c  

^a TEXAS INSTRUMENTS   (United States)

^b DEPARTMENT OF INDUSTRIAL ENGINEERING AND OPERATIONS RESEARCH   (United States)

^c BOSTON CONSULTING GROUP   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; DATA REDUCTION; PROCESS CONTROL; RELIABILITY; SEMICONDUCTOR DEVICE MODELS;

PAIRWISE COMPARISON METHOD;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0031146623     PISSN: 08946507     EISSN: None     Source Type: Journal    
DOI: 10.1109/66.572087     Document Type: Article

References (9)

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