Selected-area deposition of multiple active films for conductometric microsensor arrays

International Conference on Solid-State Sensors and Actuators, and Eurosensors IX, Proceedings

Volumn 1, Issue , 1995, Pages 831-834

  Semancik, S ^a   Cavicchi, R E ^a   Kreider, K G ^a   Suehle, J S ^a   Chaparala, P ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ARRAYS; CHEMICAL VAPOR DEPOSITION; ELECTRIC CONDUCTIVITY MEASUREMENT; FABRICATION; MICROELECTRONICS; MICROMACHINING; SEMICONDUCTING FILMS; SEMICONDUCTING SILICON; TEMPERATURE CONTROL;

CONDUCTOMETRIC MICROSENSORS; MICROHOTPLATE ARRAYS;

CHEMICAL SENSORS;

EID: 0029493129     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)