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Volumn 300, Issue 1-2, 1997, Pages 11-17
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Influence of substrate properties on the growth of titanium films: Part II
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Author keywords
Growth mechanism; Heat treatment; Stress; Titanium
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Indexed keywords
ANNEALING;
COMPRESSIVE STRENGTH;
DEPOSITION;
DIFFUSION IN SOLIDS;
EVAPORATION;
FILM GROWTH;
HYDROGEN;
OXYGEN;
STRESSES;
SUBSTRATES;
TENSILE PROPERTIES;
TITANIUM;
GROWTH MECHANISMS;
OXYGEN DOSING;
METALLIC FILMS;
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EID: 0031141118
PISSN: 00406090
EISSN: None
Source Type: Journal
DOI: 10.1016/S0040-6090(96)09525-9 Document Type: Article |
Times cited : (4)
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References (8)
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