Small-feature-size fan-out kinoform etched in GaAs

Applied Optics

Volumn 35, Issue 5, 1996, Pages 801-806

  Bengtsson, Jörgen ^a,b   Eriksson, Niklas ^a,b   Larsson, Anders ^a,b  

^a CHALMERS UNIVERSITY OF TECHNOLOGY   (Sweden)

^b Department of Microwave Technology ^*  (United States)

Author keywords

Diffractive optics; Fan out; Fresnel Kirchhoff diffraction theory; Kinoform; Monolithic integration in GaAs; Optical interconnects

Indexed keywords

EID: 0010544109     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.35.000801     Document Type: Article

References (7)

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