Quantitative cleaning characterization of a lithium-fluoride ion diode

IEEE Transactions on Plasma Science

Volumn 25, Issue 2, 1997, Pages 252-257

  Menge, Peter R ^a   Cuneo, Michael E ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANODES; ARGON; CARBON; ELECTRIC DISCHARGES; ION BEAMS; LITHIUM COMPOUNDS; MONOLAYERS; OXYGEN; PLASMA APPLICATIONS; PLASMA DIODES; X RAY PHOTOELECTRON SPECTROSCOPY;

ION DIODES; LITHIUM FLUORIDE; PLASMA CLEANING; PLASMA DISCHARGES;

ION SOURCES;

EID: 0031119320     PISSN: 00933813     EISSN: None     Source Type: Journal    
DOI: 10.1109/27.602496     Document Type: Article

References (18)

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