Fabrication and coupling-to-fibre characteristics of laser diodes integrated with a spot-size converter having a lateral taper

IEE Proceedings: Optoelectronics

Volumn 144, Issue 2, 1997, Pages 104-108

  Wada, M ^a   Okamoto, H ^a   Kohtoku, M ^a   Kawano, K ^a   Kadota, Y ^a   Kondo, Y ^a   Kishi, K ^a   Kondo, S ^a   Sakai, Y ^a   Kotaka, I ^a   Noguchi, Y ^a   Itaya, Y ^a  

^a NTT CORPORATION   (Japan)

Author keywords

Laser diodes; Spot size converters

Indexed keywords

INTEGRATED OPTOELECTRONICS; MONOLITHIC INTEGRATED CIRCUITS; OPTICAL FIBERS; SEMICONDUCTOR DEVICE MANUFACTURE; THIN FILM DEVICES;

SPOT SIZE CONVERTERS;

SEMICONDUCTOR LASERS;

EID: 0031117523     PISSN: 13502433     EISSN: None     Source Type: Journal    
DOI: 10.1049/ip-opt:19971019     Document Type: Article

References (18)

1. YOSHIDA, J., KAWACHI, M., SUGIE, T., HORIGUCHI, M., ITAYA, Y., and FUKUDA, M.: 'Strategy for developing low-cost optical modules for the ONU of optical subscriber systems'. VII International Workshop on Optical access networks Conference Proceedings, 1995, Paper 6.1-1
2. WADA, M., KOHTOKU, M., KAWANO, K., KONDO, S., TOHMORI, Y., KONDO, Y., KISHI, K., SAKAI, Y., KOTAKA, I., NOGUCHI, Y., and ITAYA, Y.: 'Laser diodes monolithically integrated with spot-size converters fabricated on 2-inch InP substrates', Electron. Lett., 1995, 31, pp. 1252-1254
3. WADA, M., KOHTOKU, M., KAWANO, K., OKAMOTO, K., KADOTA, H., KONDO, Y., KISHI, K., KONDO, S., SAKAI, Y., KOTAKA, I., NOGUCHI, Y., and ITAYA, Y.: 'High-coupling-efficiency laser diodes integrated with spot-size converters fabricated on 2-inch InP substrates', Electron. Lett., 1995, 31, pp. 2102-2104
4. TOHMORI, Y., SUZAKI, Y., FUKANO, H., OKAMOTO, M., SAKAI, Y., MITOMI, O., MATSUMOTO, S., FUKUDA, M., WADA, M., ITAYA, Y., and SUGIE, T.: 'Spotsize converted 1.3 μm laser with butt-jointed selectively grown vertically tapered waveguide', Electron. Lett., 1995, 31, pp. 1069-1070
5. KOBAYASHI, H., SODA, H., EKAWA, M., OKAZAKI, N., OGITA, S., and YAMAZAKI, S.: 'Narrow beam tapered thickness waveguide integrated BH MQW laser operation at high temperatures'. Proc. 14th IEEE Int. Semicon. Laser Conf., 1994, Paper W2.4
6. BEN-MICHAEL, R., KOREN, U., MILLER, B.I., YOUNG, M.G., CHIEN, M., and RAYBON, G.: 'InP-based multiple quantum well lasers with an integrated tapered beam expander waveguide', IEEE Photonics Technol. Lett., 1994, 6, pp. 1412-1414
7. LEALMAN, I.F., RIVERS, L.J., HARLOW, M.J., and PERRIN, S.D.: 'InGaAsP/InP tapered active layer multiquantum well laser with 1.8 dB coupling loss to cleaved singlemode fibre', Electron. Lett., 1994, 30, pp. 1685-1687
8. MOERMAN, I., D'HONDT, M., VANDERBAUWHEDE, W., HAES, J., VANWASSENHOVE, L., DE DOBBELAERE, P., BAETS, R., VAN DAELE, P., DEMEESTER, P., HUNZIKER, W., and HOLTMANN, C.: 'Vertically tapered InGaAsP/InP waveguides and lasers resulting in low-loss fibre-chip coupling'. Proc. ECOC'94, 1994, pp. 1027-1030
9. DOUSSIERE, P., GARABEDIAN, P., GRAVER, C., DEROUIN, E., GAUMONT-GOARIN, E., MICHAUD, G., and MEILLEUR, R.: 'Tapered active stripe for 1.5 μm InGaAsP/InP strained multiple quantum well lasers with reduced beam divergence', Appl Phys. Lett., 1994, 64, pp. 539-541
10. KASUKAWA, A., IWAI, N., YAMANAKA, N., and YOKOUCHI, N.: 'Output beam characteristics of 1.3 μm GaInAsP/ InP SL-QW lasers with narrow and circular output beam', Electron. Lett., 1995, 31, pp. 559-560
11. TAKEMOTO, A., MIYAZAKI, Y., SHIBATA, K., HISA, Y., GOTO, K., ITAGAKI, T., TAKIGUCHI, T., and OMURA, E.: 'High-Speed and Narrow-beam and 1.3 μm diode lasers with monolithically integrated waveguide lens formed by selective-area epitaxial growth', IOOC'95, 1995, Paper PD1-4, pp. 7-8
12. ZENGERLE, R., LEMINGER, O., WEIERSHAUSEN, W., FALTIN, K., and HUBNER, B.: 'Laterally tapered InP-InGaAsP waveguides for low-loss chip-to-fiber butt coupling', IEEE Photonics Technol. Lett., 1995, 7, pp. 532-534
13. ZENGERLE, R., BRUCKNER, H., OLZHAUSEN, H., and KOHL, A.: 'Low-loss fibre-chip coupling by buried laterally tapered InP/InGaAsP waveguide structure', Electron. Lett., 1992, 26, pp. 631-632
14. KAWANO, K., SEKINE, S., TAKEUCHI, H., WADA, M., KOHTOKU, M., YOSHIMOTO, N., ITO, T., YANAGI-BASHI, M., KONDO, S., and NOGUCHI, Y.: '4×4 InGaAlAs/ InAlAs MQW directional coupler waveguide switch modules integrated with spot-size converters and their 10 Gbit/s operation', Electron. Lett., 1995, 31, pp. 96-97
15. UCHIDA, N., HIBINO, Y., SUZUKI, Y., KUROSAKI, T., ISHIHARA, N., NAKAMURA, M., HASHIMOTO, T., AKAHORI, Y., INOUE, Y., MORIWAKI, K., YAMADA, Y., KATO, K., TOHMORI, Y., WADA, M., and SUGIE, T.: 'Passively aligned hybrid WDM module integrated with a spot-size converted laser diode and waveguide photodiode on a PLC platform for fiber-to-the-home'. '96 OFC, 1996, Paper PD14,
16. KONDO, Y., KISHI, K., ITOH, M., OOHASHI, H., ITAYA, Y., and YAMAMOTO, M.: '1.3 μm buried-heterostructure lasers using a CH4 Reactive-ion-etched mesa structure grown by metal organic vapor phase epitaxy'. Proc. 8th Int. Conf. on InP related materials, 1996, Paper TuB B2-3, pp. 384
17. LOVE, J.D.: 'Application of a low-loss criterion to optical waveguides and devices', IEE Proc. J., 1989, 136, pp. 225-228
18. MITOMI, O., KASAYA, K., and MIYAZAWA, H.: 'Design of a single-mode tapered waveguide for low-loss chip-to-fiber coupling', IEEE J. Quantum Electron.. 1994, 30, pp. 1787-1793