Laser diodes integrated with butt-jointed spotsize converter fabricated on 2-in wafer

Journal of Lightwave Technology

Volumn 15, Issue 3, 1997, Pages 498-503

  Wada, Masato ^a,b,c,d   Okamoto, Hiroshi ^b,e,f,g   Kishi, Kenji ^b,e,g,h   Kadota, Yoshiaki ^b,e,g,i   Okamoto, Minoru ^a,b,e,j,k   Kondo, Yasuhiro ^a,b   Sakai, Yoshihisa ^b   Oohashi, Hiromi ^b   Suzaki, Yasumasa ^b   Tohmori, Yuichi ^a,b   Nakao, Masashi ^a,b   Itaya, Yoshio ^a,b   Yamamoto, Mitsuo ^b  

^a IEEE   (Japan)

^b NTT CORPORATION   (Japan)

^c WASEDA UNIVERSITY   (Japan)

^d Research Planning Department   (Japan)

^e NTTT Sci Core Technol Lab Grp ^*

^f CHIBA UNIVERSITY   (Japan)

^g JAPAN SOCIETY OF APPLIED PHYSICS   (Japan)

^h KANAZAWA UNIVERSITY   (Japan)

ⁱ HIROSHIMA UNIVERSITY   (Japan)

^j SHIZUOKA UNIVERSITY   (Japan)

^k OSAKA UNIVERSITY   (Japan)

more..

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC CURRENTS; ELECTRIC LOSSES; EPITAXIAL GROWTH; FABRICATION; INTEGRATED CIRCUITS; METALLORGANIC VAPOR PHASE EPITAXY; OPTICAL FIBER COUPLING; PHOTOLUMINESCENCE; REACTIVE ION ETCHING; SEMICONDUCTOR DEVICE STRUCTURES; SEMICONDUCTOR QUANTUM WELLS;

MICROPHOTOLUMINESCENCE; PHOTONIC INTEGRATED CIRCUITS; SPOTSIZE CONVERTER INTEGRATED LASER DIODE; THRESHOLD CURRENTS;

SEMICONDUCTOR LASERS;

EID: 0031103753     PISSN: 07338724     EISSN: None     Source Type: Journal    
DOI: 10.1109/50.557566     Document Type: Article

References (17)

1. J. Yoshida, M. Kawachi, T. Sugie, M. Horiguchi, Y. Itaya, and M. Fukuda, "Strategy for developing low-cost optical modules for the ONU of optical subscriber systems," in VII Int. Workshop Optical Access Networks Conf. Proc., 6.1-1, 1995.
2. Y. Tohmori, Y. Suzaki, H. Fukano, M. Okamoto, Y. Sakai, O. Mitomi S. Matsumoto, M. Fukuda, M. Wada, Y. Itaya, and T. Sugie, "Spot-size converted 1.3 μm laser with butt-jointed selectively grown vertically tapered waveguide," Electron. Lett., vol. 31, pp. 1069-1070, 1995.
3. H. Kobayashi, H. Soda, M. Ekawa, N. Okazaki, S. Ogita, and S. Yamazaki, "Narrow beam tapered thickness waveguide integrated BH MQW laser operation at high temperatures," in Proc. 14th IEEE Int. Semicon. Laser Conf., W2.4, 1994.
4. I. Moerman, M. D'Hondt, W. Vanderbauwhede, J. Haes, L. Vanwassenhove, P. De Dobbelaere, R. Baets, P. Van Daele, P. Demeester, W. Hunziker, and C. Holtmann, "Vertically tapered InGaAsP/InP waveguides and lasers resulting in low-loss fiber-chip coupling," in Proc. ECOC'94, 1994, pp. 1027-1030.
5. A. Takemoto, Y. Miyazaki, K. Shibata, Y. Hisa, K. Goto, T. Itagaki, T. Takiguchi, and E. Omura, "High-speed and narrow-beam and 1.3 diode lasers with monolithically integrated waveguide lens formed by selective-area epitaxial growth," IOOC'95, PD1-4, pp. 7-8, 1995.
6. K. Kasaya, O. Mitomi, M. Naganuma, Y. Kondo, and Y. Noguchi, "A simple laterally tapered waveguide for low-loss coupling to single-mode fibers," IEEE Photon. Technol. Lett., vol. 5, pp. 345-347, 1993.
7. R. Ben-Michael, U. Koren, B. I. Miller, M. G. Young, M. Chien, and G. Raybon, "InP-based multiple quantum well lasers with an integrated tapered beam expander waveguide," IEEE Photon. Technol. Lett., vol. 6, pp. 1412-1414, 1994.
8. I. F. Lealman, L. J. Rivers, M. J. Harlow, and S. D. Perrin, "InGaAsP/InP tapered active layer multiquantum well laser with 1.8 dB coupling loss to cleaved singlemode fiber," Electron. Lett., vol. 30, pp. 1685-1687, 1994.
9. P. Doussiere, P. Garabedian, C. Graver, E. Derouin, E. Gaumont-Goarin, G. Michaud, and R. Meilleur, "Tapered active stripe for 1.5-μm InGaAsP/InP strained multiple quantum well lasers with reduced beam divergence," Appl. Phys. Lett., vol. 64, pp. 539-541, 1994.
10. A. Kasukawa, N. Iwai, N. Yamanaka, and N. Yokouchi, "Output beam characteristics of 1.3 μm GaInAsP/InP SL-QW lasers with narrow and circular output beam," Electron. Lett., vol. 31, pp. 559-560, 1995.
11. M. Wada, M. Kohtoku, K. Kawano, S. Kondo, Y. Tohmori, Y. Kondo, K. Kishi, Y. Sakai, I. Kotaka, Y. Noguchi, and Y. Itaya, "Laser diodes monolithically integrated with spot-size converters fabricated on 2-inch InP substrates," Electron. Lett., vol. 31, pp. 1252-1254, 1995.
12. R. Zengerle, O. Leminger, W. Weiershausen, K. Faltin, and B. Hubner, "Laterally tapered InP-InGaAsP waveguides for low-loss chip-to-fiber butt coupling," IEEE Photon. Technol. Lett., vol. 7, pp. 532-534, 1995.
13. N. Uchida, Y. Hibino, Y. Suzuki, T. Kurosaki, N. Ishihara, M. Nakamura, T. Hashimoto, Y. Akahori, Y. Inoue, K. Moriwaki, Y. Yamada, K. Kato, Y. Tohmori, M. Wada, and T. Sugie, "Passively aligned hybrid WDM module integrated with a spot-size converted laser diode and waveguide photodiode on a PLC platform for fiber-to-the-home," in '96 OFC, PD14, 1996.
14. 4 reactive-ion-etched mesa structure grown by metal organic vapor phase epitaxy," in Proc. 8th Int. Conf. InP Related Materials, 1996, TuB2-3, p. 384.
15. H. Okamoto, Y. Suzaki, Y. Tohmori, M. Okamoto, Y. Kondo, Y. Kadota, M. Yamamoto, K. Kishi, Y. Sakai, M. Wada, M. Nakao, and Y. Itaya, "1.3-μm laser diodes with butt-jointed selectively grown spot-size converters uniformly fabricated on a 2 in InP substrate," Electron. Lett., vol. 32, pp. 1099-1101, 1996.
16. Y. Suzaki, O. Mitomi, Y. Tohmori, H. Okamoto, Y. Kondo, Y. Sakai, M. Okamoto, and Y. Kadota, "Impact of current blocking structure on the coupling characteristics in 1.3-μm spot-size converted laser diodes," in Tech. Dig. Integr. Photon. Res., vol. 6, pp. 516-519/IWF1-1, 1996.
17. M. Yamamoto, Y. Itaya, and T. Sugie, "1.3-μm laser diodes with spot-size converter for access network," in Proc. 8th Int. Conf. on InP Related Materials, 1996, TuB 2-1, p. 376.