Vertical adjustment in surface-micromachined free-space micro-optical bench

Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS

Volumn , Issue , 1996, Pages 490-491

  Lin, L Y ^a   Shen, J L ^a   Lee, S S ^a   Wu, M C ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; LASER BEAMS; LASER TUNING; MICROMACHINING; MIRRORS; OPTICAL INSTRUMENT LENSES; OPTICAL VARIABLES MEASUREMENT; OPTOELECTRONIC DEVICES; SCANNING ELECTRON MICROSCOPY;

BEAM STEERING DEVICE; COMB DRIVE ACTUATOR; FAR FIELD PATTERNS; FREE SPACE MICROOPTICAL BENCH; MICROHINGE TECHNOLOGY; MICROOPTICAL ELEMENTS; VERTICAL ADJUSTMENT;

SEMICONDUCTOR LASERS;

EID: 0029721607     PISSN: 10928081     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (4)