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Volumn 108, Issue 3, 1997, Pages 365-369
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Analysis and control of surface degenerated layers grown on thin Pb(Zr, Ti) O 3 films
a
HITACHI LTD
(Japan)
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Author keywords
Decomposition; Ferroelectric; Nitric acid; PZT; Surface degradation; XPS
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Indexed keywords
FERROELECTRIC MATERIALS;
LEAD COMPOUNDS;
NITRIC ACID;
REFLECTION HIGH ENERGY ELECTRON DIFFRACTION;
THIN FILMS;
X RAY PHOTOELECTRON SPECTROSCOPY;
SURFACE DEGENERATED LAYER;
SURFACE STRUCTURE;
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EID: 0031103054
PISSN: 01694332
EISSN: None
Source Type: Journal
DOI: 10.1016/S0169-4332(96)00607-1 Document Type: Article |
Times cited : (19)
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References (11)
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