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Diamond and Related Materials

Volumn 4, Issue 4, 1995, Pages 272-283

Recent results in cubic boron nitride deposition in light of the sputter model

(4) Reinke, S a Kuhr, M a Kulisch, W a Kassing, R a

a UNIVERSITY OF KASSEL (Germany)

Author keywords

Cubic boron nitride; Ion assisted deposition; Nucleation; Sputtering

Indexed keywords

EID: 0000036569 PISSN: 09259635 EISSN: None Source Type: Journal
DOI: 10.1016/0925-9635(94)05303-0 Document Type: Article

Times cited : (144)

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