Isolating the killer defect: Process analysis using particle map to probe map correlation

IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop

Volumn , Issue , 1993, Pages 198-200

  Carman, Eric ^a   Lawrence, Chris ^a   Nair, Raj ^a   Sanchez, Gerald ^a  

^a MOTOROLA INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CORRELATION METHODS; DEFECTS; DEPOSITION; FAILURE ANALYSIS; GATES (TRANSISTOR); INTEGRATED CIRCUIT MANUFACTURE; MICROSCOPIC EXAMINATION; PARTICLES (PARTICULATE MATTER); PROCESS CONTROL; RANDOM PROCESSES; SEMICONDUCTOR DEVICE MANUFACTURE;

KILLER DEFECTS; PARTICLE MAP; PARTICLE REDUCTION EFFORTS;

MOS DEVICES;

EID: 0027835738     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (0)