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Volumn 109-110, Issue , 1997, Pages 43-47

Laser-material interactions probed with picosecond infrared spectroscopy

Author keywords

Ablation; Photoresist; Picosecond infrared spectroscopy; Polymer

Indexed keywords

BAND STRUCTURE; INFRARED SPECTROSCOPY; LASER ABLATION; PHOTOCHEMICAL REACTIONS; PHOTORESISTS; ULTRAVIOLET RADIATION;

EID: 0031076602     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(96)00617-4     Document Type: Article
Times cited : (21)

References (16)
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    • C.G. Willson, N.J. Clecak, B.D. Grant and R.J. Twieg, Electrochem. Soc. (Preprints, St. Louis, MO, 1980) p. 696; B.D. Grant, N.J. Clecak, R.J. Twieg and C.G. Willson, IEEE Trans. Electron Devices ED-28 (1981) 1300; C.G. Willson, R.D. Miller and D.R. McKean, Proc. Spie Adv. Resist Technol. Process. IV (1987) 771.
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.