Diamond-like coating prepared by pulsed laser sputtering of graphite in a high-vacuum environment

Applied Surface Science

Volumn 92, Issue , 1996, Pages 43-46

  Bogonin, I A ^b   Karuzskii, A L ^a   Melnik, N N ^a   Mityagin, Yu A ^a   Murzin, V N ^a   Orlikovsky, A A ^b   Perestoronin, A V ^a   Sverbil, P P ^a   Tkachenko, S D ^a   Tsikunov, A V ^a   Volchkov, N A ^a   Zhurkin, B G ^a  

^a LEBEDEV PHYSICAL INSTITUTE   (Russian Federation)

^b RUSSIAN ACADEMY OF SCIENCES   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON; CHEMICAL BONDS; COATINGS; DIAMONDS; ELECTRIC CONDUCTIVITY OF SOLIDS; FILM GROWTH; FILM PREPARATION; GRAPHITE; HYDROGEN; PULSED LASER APPLICATIONS; SPECTROSCOPY; SPUTTERING;

DIAMOND LIKE COATING; HIGH VACUUM ENVIRONMENT; INFRARED TRANSPARENCY; PULSED LASER SPUTTERING;

THIN FILMS;

EID: 0030562172     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/0169-4332(95)00199-9     Document Type: Article

References (8)

1. A.I. Golovashkin, B.C. Zhurkin, A.L. Karuzskii, S.I. Krasnosvobodtsev, V.P. Martovitsky, E.V. Pechen, V.V. Rodin, Yu.I. Stepanov and A.V. Shirkov, Fiz. Tverd. Tela. 28 (1986) 3342 [Sov. Phys. Solid State].
2. F. Davanloo, E.M. Juengerman, D.R. Jander, T.J. Lee and C.B. Collins, J. Appl. Phys. 67 (1990) 2081.
3. D.L. Pappas, K.L. Saenger, J. Bruley, W. Krakow, J.J. Cuomo, T. Gu and R.W. Collins, J. Appl. Phys. 71 (1992) 5675.
4. T. Mon and J. Namba, J. Appl. Phys. 55 (1984) 3276.
5. J. Robertson, in: Diamond and Diamond-Like Films and Coatings, Eds. R.E. Clausing et al. (Plenum, New York, 1991) p. 331.
6. J.-P. Hirvonen, J. Koskinen, R. Lappalainen and A. Anttila, J. Electron. Mater. 20 (1991) 127.
7. A. Rengan, J. Narayan, C. Jahnke, S. Bedge, J.L. Park and M. Li, Mater. Sci. Eng. B 15 (1992) 15.
8. T. Sato, S. Furuno, S. Iguchi, M. Hanabusa, Appl. Phys. A 45 (1988) 355.