Fabrication of perovskite (Pb,La)(Zr,Ti)O3 thin films by electron cyclotron resonance plasma enhanced chemical vapor deposition

Japanese Journal of Applied Physics, Part 2: Letters

Volumn 36, Issue 2 SUPPL. B, 1997, Pages

  Shin, Joong Shik ^a   No, Kwang Soo ^a   Lee, Won Jong ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

ECR; Ferroelectric; Film; PECVD; PLZT

Indexed keywords

ANNEALING; CHEMICAL VAPOR DEPOSITION; CRYSTAL MICROSTRUCTURE; ELECTRON CYCLOTRON RESONANCE; FERROELECTRIC MATERIALS; LANTHANUM COMPOUNDS; ORGANOMETALLICS; PEROVSKITE; PLASMA APPLICATIONS; SEMICONDUCTING LEAD COMPOUNDS; THERMAL EFFECTS; THIN FILMS;

LANTHANUM MODIFIED LEAD ZIRCONATE TITANATE;

SEMICONDUCTING FILMS;

EID: 0031073141     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/JJAP.36.L223     Document Type: Article

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