The SCALPEL proof of concept system

Microelectronic Engineering

Volumn 35, Issue 1-4, 1997, Pages 477-480

  Harriott, L R ^a   Berger, S D ^b   Biddick, C ^a   Blakey, M I ^a   Bowler, S W ^b   Brady, K ^a   Camarda, R M ^a   Connelly, W F ^a   Crorken, A ^a   Custy, J ^a   DeMarco, R ^a   Farrow, R C ^a   Felker, J A ^a   Fetter, L ^a   Freeman, R ^a   Hopkins, L ^a   Huggins, H A ^a   Knurek, C S ^a   Kraus, J S ^a   Liddle, J A ^a   Mkrtychan, M ^a   Novembre, A E ^a   Peabody, M L ^a   Tarascon, R G ^a   Wade, H H ^a   Waskiewicz, W K ^a   Watson, G P ^a   Werder, K S ^a   Windt, D ^a   more..

^a LUCENT TECHNOLOGIES   (United States)

^b Integrated Solutions Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON SCATTERING; INTEGRATED CIRCUIT MANUFACTURE; INTERFEROMETERS; LASER APPLICATIONS; MASKS; POSITION MEASUREMENT; SERVOMECHANISMS; SYSTEMS ANALYSIS;

LASER INTERFEROMETER SYSTEM; PROJECTION ELECTRON BEAM LITHOGRAPHY; TEST PATTERN EXPOSURES;

ELECTRON BEAM LITHOGRAPHY;

EID: 0031072164     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(96)00189-X     Document Type: Article

References (12)

1. S. D. Berger, J. M. Gibson, Appl. Phys. Lett., 57, 153 (1990).
2. L.R. Harriott, S.D. Berger, C. Biddick, M.I. Blakey, S.W. Bowler, K. Brady, R.M. Camarda, W.F. Connelly, A. Crorken, J. Custy, R. DeMarco, R.C. Farrow, J.A .Felker, L. Fetter, R. Freeman, L. Hopkins, H.A. Huggins, C.S. Knurek, J.S. Kraus, J.A. Liddle, M. Mkrtychan, A.E. Novembre, M.L. Peabody, R.G. Tarascon, H.H. Wade, W.K. Waskiewicz, G.P. Watson, K.S. Werder, D. Windt, to be published in J. Vac. Sci. Technol. B.
3. S. D. Berger, C. Biddick, M. Blakey, K. Bolan, S. Bowler, K. Brady, R. M. Camarda, W. Connely, R. Farrow, J. Felker, L. Fetter, L. R. Harriott, H. A. Huggins, J. S. Kraus, J. A. Liddle, M. Mkrtchyan, A. Novembre, M. Peabody, T. Russel, W. Simpson, R. Tarascon, H. Wade, W. Waskiewicz and P. Watson, Proc. SPIE, Vol 2322, 434 (1994).
4. J.A. Liddle, H.A. Huggins, and G.P. Watson J. Vac. Sci. Technol. B13, 2483 (1995).
5. S.D. Berger, D.J. Eaglesham, R.C. Farrow, R.R. Freeman, J.S. Kraus, and J.A. Liddle, J. Vac. Sci. Technol. B 11, 2294 (1993).
6. M.M. Mkrtchyan, A.J. Liddle, S.D. Berger, L.R. Harriott, A.M. Schwartz and J.M. Gibson, J. Vac. Sci. Technol. B 12, 3508 (1994).
7. L.R. Harriott, S.D. Berger. J.A. Liddle, G.P. Watson, and M.M. Mkrtchyan, J. Vac. Sci. Technol. B13, 2404 (1995).
8. W.K. Waskiewicz, S.D. Berger, L.R. Harriott, M.M. Mkrtchyan, S.W. Bowler, and J.M. Gibson, Proc. SPIE Vol. 2522, 13 (1995).
9. W. Devore and S.D. Berger to be published in J. Vac. Sci. Technol B.
10. R.G. Tarascon, K. Bolan, M. Blakey, R.M. Camarda, R.C. Farrow, L.A. Fetter, H.A. Huggins, J.S. Kraus, J.A. Liddle, D.A. Mixon, A.E. Novembre, G.P. Watson, and S.D. Berger, J. Vac. Sci. Technol. B12, 3444 (1994).
11. A. E. Novembre, R. G. Tarascon, S. D. BergerC. J. Biddick, M. I. Blakey, K. J. Bolan, L. A. Fetter, L. R. Harriott, H. A. Huggins, C. S. Knurek, J.A. Liddle, D. A. Mixon and M. L. Peabody; J. Photopolymer Sci. and Technol. 9(4), 663(1996).
12. G.P. Watson, S.D. Berger, J.A. Liddle, and W.K. Waskiewicz, J. Vac. Sci. Technol. B13, 2504 (1995).