Photochemical deposition of ZnS from the gas phase and simultaneous luminescence detection of photofragments from a single-source precursor, Zn(S2COCHMe2)2

Journal of the American Chemical Society

Volumn 119, Issue 1, 1997, Pages 163-168

  Cheon, Jinwoo ^a   Talaga, David S ^a   Zink, Jeffrey I ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ZINC DERIVATIVE;

ARTICLE; DRUG MANUFACTURE; MASS SPECTROMETRY; PHOTOCHEMISTRY; TECHNIQUE; X RAY DIFFRACTION;

EID: 0031059250     PISSN: 00027863     EISSN: None     Source Type: Journal    
DOI: 10.1021/ja9625891     Document Type: Article

References (35)

1. Avey, A. A.; Hill, R. H. J. Am. Chem. Soc. 1996, 118, 237.
2. Doppelt, P.; Baum, T. H. MRS Bull. 1994, 19, 41.
3. Larciprete, R. Appl. Surf. Sci. 1990, 46, 19.
4. Lee, E. J.; Bitner, T. W.; Ha, J. S.; Shane, M. J.; Sailor, M. J. J. Am. Chem. Soc. 1996, 118, 5375.
5. Bhatia, S. K.; Hickman, J. J.; Ligler, F. S. J. Am. Chem. Soc. 1992, 114, 4432.
6. Dressick, W. J.; Dulcey, C. S.; Georger, J. H., Jr.; Calvert, J. M. Chem. Mater. 1993, 5, 148.
7. Moreau, W. M. Semiconductor Lithography; Principles, Practices, and Materials; Plenum: New York, 1988.
8. Kompa, K. L. Angew. Chem., Int. Ed. Engl. 1988, 27, 1314.
9. Herman, I. P. Chem. Rev. 1989, 89, 1323.
10. Eden, J. G. Photochemical Vapor Deposition; Wiley: New York, 1992.
11. Wexler, D.; Zink, J. I.; Tutt, L. W.; Lunt, S. R. J. Phys. Chem. 1993, 97, 13563.
12. Talaga, D. S.; Zink, J. I. Inorg. Chem. 1996, 35, 5050.
13. Li, J. W.; Su, Y. K.; Yokoyama, M. Jpn. J. Appl. Phys. 1996, 35, 5050.
14. Smith, P. B. J. Vac. Sci. Technol. A 1989, 7, 1451.
15. Mclaughlin, M.; Sakeek, H. F.; Maguire, P.; Graham, W. G.; Molloy, J.; Morrow, T.; Laverty, S.; Andersen, J. Appl. Phys. Lett. 1993, 63, 1865.
16. Kitagawa, M.; Tomomura, Y.; Nakanishi, K.; Suzuki, A.; Nakajima, S. J. Cryst. Growth 1990, 101, 52.
17. Yamaga, S. Jpn. J. Appl. Phys. 1991, 30, 437.
18. Neumark, G. F.; Park, R. M.; Depuydt, J. M. Physics Today 1994 (June), 26.
19. Ohring, M. The Materials Science of Thin Films; Academic: San Diego, 1992.
20. McClean, I. P.; Thomas, C. B. Semicond. Sci. Technol. 1992, 7, 1394.
21. Kukimoto, H. J. Cryst. Growth 1991, 107, 637.
22. Giapis, K. P.; Jensen, K. F.; Potts, J. E.; Pachuta, S. J. J. Electron. Mater. 1990, 19, 453.
23. Ando, H.; Taike, A.; Konagai, M.; Takahashi, K. J. Appl. Phys. 1987, 62, 1251.
24. Cowley, A. H.; Jones, R. A. Angew. Chem., Int. Ed. Engl. 1989, 28, 1208.
25. Zanella, P.; Rossetto, G.; Brianese, N.; Ossola, F.; Porchia, M.; Williams, J. O. Chem. Mater. 1991, 3, 225.
26. O'Brien, P.; Nomura, R. J. Mater. Chem. 1995, 5, 1761.
27. Rao, S. R. Xanthate and Related Compounds; Dekker: New York, 1971.
28. JCPDS Powder Diffraction File; McClune, W. F., Ed.; International Center for Diffraction Data: Swarthmore, PA, 1990.
29. Fang, J.; Holloway, P. H.; Yu, J. E.; Jones, K. S.; Pathangey, B.; Brettschneider, E.; Anderson, T. J. Appl. Surf. Sci. 1993, 70/71, 701.
30. Pearse, R. W. B.; Gaydon, A. G. The Identification of Molecular Spectra; Chapman and Hall: London, 1976.
31. Schwendiman, D. F.; Zink, J. I. J. Am. Chem. Soc. 1976, 98, 4439
32. Given, K. W.; Mattson, B. M.; McGuiggan, M. F.; Miessler, G. L.; Pignolet, L. H. J. Am. Chem. Soc. 1977, 99, 4855.
33. Sapers, S. P.; Andraos, N.; Donaldson, D. J. J. Chem. Phys. 1991, 95, 1738.
34. Similar explanations also have been reported on radical species of other chalcogene elements. (a) Henriksen, L. In The Chemistry of Organic Selenium and Tellurium Compounds; Patai, S., Ed.; Wiley: New York, 1987; Vol. 2.
35. (b) Gysling, H. J.; Wemberg, A. A.; Blanton, T. N. Chem. Mater. 1992, 4, 900.