Fabrication of a silicon micromachined capacitive microphone using a dry-etch process

Sensors and Actuators, A: Physical

Volumn 53, Issue 1-3, 1996, Pages 237-242

  Ning, Y B ^a   Mitchell, A W ^a,b   Tait, R N ^a  

^a 318   (Canada)

^b NORTEL NETWORKS   (Canada)

Author keywords

Capacitive microphones; Dry etching; Micromachining; Silicon

Indexed keywords

EID: 0004538916     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/0924-4247(96)01130-2     Document Type: Article

References (16)

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