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Volumn 69, Issue , 1997, Pages 92-97

Diffusion in relaxed and strained SiGe layers

Author keywords

[No Author keywords available]

Indexed keywords

ANTIMONY; BORON; DIFFUSION; ESTIMATION; IMPURITIES; INTERDIFFUSION (SOLIDS); LATTICE CONSTANTS; POINT DEFECTS; SEMICONDUCTING SILICON COMPOUNDS; SUBSTRATES;

EID: 0030736191     PISSN: 02811847     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article
Times cited : (5)

References (20)
  • 2
    • 3743049662 scopus 로고    scopus 로고
    • Hull, H. in reference 1, p. 17
    • Hull, H. in reference 1, p. 17.
  • 10


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.