Highly focused ion beams in integrated circuit testing

Materials Science Forum

Volumn 248-249, Issue , 1997, Pages 427-432

  Horn, K M ^a   Dodd, P E ^a   Doyle, B L ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

Ion Beam Induced Charge Collection; Ion Microbeam; Radiation Testing; Single Event Upset

Indexed keywords

CHARGE CARRIERS; COMPUTER SIMULATION; FIELD EFFECT TRANSISTORS; IMAGING TECHNIQUES; ION BEAMS; RADIATION;

NUCLEAR MICROPROBE SYSTEM;

INTEGRATED CIRCUIT TESTING;

EID: 0030703894     PISSN: 02555476     EISSN: 16629752     Source Type: Book Series    
DOI: 10.4028/www.scientific.net/msf.248-249.427     Document Type: Article

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