Subsurface lattice disorder in polished II-VI semiconductors

CIRP Annals - Manufacturing Technology

Volumn 46, Issue 1, 1997, Pages

  Lucca, D A ^a   Maggiore, C J ^b  

^a OKLAHOMA STATE UNIVERSITY   (United States)

^b LOS ALAMOS NATIONAL LABORATORY   (United States)

Author keywords

Polishing; Subsurface damage; Surface

Indexed keywords

CHEMICAL POLISHING; SEMICONDUCTING CADMIUM COMPOUNDS; SEMICONDUCTING ZINC COMPOUNDS; SURFACES;

CADMIUM SULFIDE; SUBSURFACE LATTICE DISORDER; ZINC SELENIDE;

CRYSTAL DEFECTS;

EID: 0030673968     PISSN: 00078506     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0007-8506(07)60871-3     Document Type: Article

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