Subsurface Damage Distribution in Ultraprecision Machined CdS

CIRP Annals - Manufacturing Technology

Volumn 45, Issue 1, 1996, Pages 519-522

  Lucca, D A ^a   Maggiore, C J ^b   Rhorer, R L ^c  

^a Oklahoma State University   (United States)

^b LOS ALAMOS NATIONAL LABORATORY   (United States)

^c NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

subsurface damage; surfaces; ultra precision machining

Indexed keywords

CRYSTAL DEFECTS; CRYSTAL ORIENTATION; SINGLE CRYSTALS; SURFACES; TURNING;

CADMIUM SULFIDE; SUBSURFACE DAMAGE DISTRIBUTION; ULTRAPRECISION MACHINING;

SEMICONDUCTING CADMIUM COMPOUNDS;

EID: 0029694001     PISSN: 00078506     EISSN: 17260604     Source Type: Journal    
DOI: 10.1016/S0007-8506(07)63115-1     Document Type: Article

References (9)

1. Assessment of Subsurface Damage in Ultraprecision Machined CdS by Ion Channeling
2. Depth Profile Studies of Extended Defects Induced by Ion Implantation in Si and Al
3. Transmission Electron Microscopy of Nanomachined Silicon Crystals
4. Surface Damage in Nanomachined Silicon
5. Investigation of Surface Integrity by Molecular Dynamics Simulation
6. Brittle-Ductile Transition Phenomena in Miciroindentation and Micromachining
7. Polishing and Ultraprecision Machining of Semiconductor Substrate Materials