Investigation of plasma immersion ion implanted niobium oxide and titanium nitride films by nanohardness measurement

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 120, Issue 1-4, 1996, Pages 282-285

  Koniger A ^a   Ensinger, W ^a   Hammerl, C ^a   Hochbauer T ^a   Schrag, G ^a   Hartmann, J ^a   Thomae, R W ^b   Bender, H ^b   Stritzker, B ^a   Rauschenbach, B ^a  

^a UNIVERSITY OF AUGSBURG   (Germany)

^b GOETHE UNIVERSITY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

HARDNESS; NIOBIUM COMPOUNDS; PLASMA APPLICATIONS; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SURFACE TREATMENT; THIN FILMS; TITANIUM NITRIDE; X RAY DIFFRACTION ANALYSIS;

PLASMA IMMERSION ION IMPLANTATION;

ION IMPLANTATION;

EID: 0030566610     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(96)00527-7     Document Type: Article

References (12)

1. J.R. Conrad and T. Castagna, Bull. Am. Phys. Soc. 31 (1986) 1479.
2. J.R. Conrad, J. Appl. Phys. 62 (1987) 777.
3. J. Tendys, I.J. Donnelly, M.J. Kenny and J.T.A. Pollock, Appl. Phys. Lett. 53 (1988) 2143.
4. G.A. Collins, R. Hutchings and J. Tendys, Mater. Sci. Eng. A 139 (1991) 171.
5. N.W. Cheung, Nucl. Instr. and Meth. B 55 (1991) 811.
6. W. Ensinger, J. Hartmann, H. Bender, R.W. Thomae, A. Königer, B. Stritzker and B. Rauschenbach, Surf. Coat. Technol. A 14 (1996), in press.
7. J. Hartmann, W. Ensinger, A. Königer, B. Stritzker and B. Rauschenbach, J. Vac. Sci. Technol., submitted for publication in J. Vac. Sci. Technol.
8. R.W. Thomae, B. Seiler, H. Bender, J. Brutscher, A. Jakob, H. Klein, A. Maaser, J. Müller, M. Sarstedt and M. Weber, in: Ion Implantation Technology-94, eds. S. Coffa, G. Ferla, F. Priolo and E. Rimini (Elsevier Science, 1994) p. 989.
9. W. Ensinger, J. Hartmann, J. Klein, P. Usedom, B. Stritzker and B. Rauschenbach, Mater. Res. Soc. Symp. Proc. 396 (1996) 521.
10. A. Königer, J.W. Gerlach, H. Wengenmair, C. Hammerl, J. Hartmann and B. Rauschenbach, Surf. Coat. Technol. 84 (1996) 439.
11. M.F. Doerner and W.D. Nix, J. Mater. Res. 1 (1986) 601.
12. W.C. Oliver and G.M. Pharr, J. Mater. Res. 7 (1992) 1564.