Defect production mechanisms in metals and covalent semiconductors

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 120, Issue 1-4, 1996, Pages 19-26

  Diaz De La Rubia, T ^a  

^a LAWRENCE LIVERMORE NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHIZATION; CRYSTAL DEFECTS; CRYSTAL IMPURITIES; DIFFUSION IN SOLIDS; METALS; MOLECULAR DYNAMICS; SEMICONDUCTING SILICON; SIMULATION;

FRENKEL DEFECTS; TRANSIENT ENHANCED DIFFUSION;

ION IMPLANTATION;

EID: 0030566516     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(96)00524-1     Document Type: Article

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