Strain profiles in He-implanted waveguide layers of LiNbO3 crystals

Materials Letters

Volumn 27, Issue 1-2, 1996, Pages 17-20

  Zolotoyabko, E ^a   Avrahami, Y ^a   Sauer, W ^b   Metzger, T H ^b   Peisl, J ^b  

^a TECHNION ISRAEL INSTITUTE OF TECHNOLOGY   (Israel)

^b UNIVERSITY OF MUNICH   (Germany)

Author keywords

Implantation; Lithium niobate (LiNbO3); Optical waveguide; Rocking curve; Strain profile; X ray diffraction

Indexed keywords

CHEMICAL MODIFICATION; CRYSTAL STRUCTURE; CRYSTALS; ION IMPLANTATION; LATTICE CONSTANTS; OPTICAL WAVEGUIDES; STRAIN; X RAY DIFFRACTION;

CONVENTIONAL HIGH RESOLUTION X RAY DIFFRACTION; DEPTH RESOLVED STRAIN PROFILE; GRAZING INCIDENCE X RAY DIFFRACTION; HELIUM IMPLANTED WAVEGUIDE LAYERS; LITHIUM NIOBATE WAFER; ROCKING CURVE;

LITHIUM COMPOUNDS;

EID: 0030145601     PISSN: 0167577X     EISSN: None     Source Type: Journal    
DOI: 10.1016/0167-577X(95)00256-1     Document Type: Article

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