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Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 120, Issue 1-4, 1996, Pages 198-202

Nuclear energy and cascade effects on the ion-assisted crystal nucleation in amorphous silicon

(5) Spinella, C a Priolo, F b Puglisi, R A b Lombardo, S a Campisano, S U b

a CNR IMETEM (Italy)

b UNIVERSITY OF CATANIA (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS SILICON; CRYSTAL GROWTH; CRYSTALLIZATION; ION IMPLANTATION; MICROSCOPIC EXAMINATION; MORPHOLOGY; NUCLEATION; PHASE TRANSITIONS; SEMICONDUCTING SILICON; SEMICONDUCTOR DOPING;

CRYSTALLIZATION KINETICS; ION ASSISTED NUCLEATION;

ION BOMBARDMENT;

EID: 0030566497 PISSN: 0168583X EISSN: None Source Type: Journal
DOI: 10.1016/S0168-583X(96)00508-3 Document Type: Article

Times cited : (4)

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