3D-microERDA microscopy of implanted H-distributions in diamond

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 118, Issue 1-4, 1996, Pages 332-337

  Connell, S H ^a   Sideras Haddad, E ^a   Smallman, C G ^a   Sellschop, J P F ^a   Machi, I Z ^b   Bharuth Ram, K ^b  

^a UNIVERSITY OF THE WITWATERSRAND   (South Africa)

^b UNIVERSITY OF KWAZULU NATAL   (South Africa)

Author keywords

[No Author keywords available]

Indexed keywords

GROWTH (MATERIALS); HYDROGEN; IMPURITIES; ION BEAMS; ION IMPLANTATION; MICROSCOPIC EXAMINATION; SPECTROSCOPY; THREE DIMENSIONAL;

NUCLEAR RESONANCE REACTION ANALYSIS TECHNIQUE; THREE DIMENSIONAL ELASTIC RECOIL DETECTION ANALYSIS; TOTAL ELEMENTAL CONCENTRATION;

SEMICONDUCTING DIAMONDS;

EID: 0030565180     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/0168-583X(95)01474-8     Document Type: Article

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