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Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 115, Issue 1-4, 1996, Pages 572-576

Surface atomic vacancies created by ion bombardment and desorption

(3) Wei, Y a Li, L a Tsong, I S T a

a ARIZONA STATE UNIVERSITY (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; DESORPTION; IONS; SCANNING TUNNELING MICROSCOPY; SILICON; SURFACES; THERMAL EFFECTS;

DIMER VACANCIES; SURFACE ATOMIC VACANCIES;

ION BOMBARDMENT;

EID: 0030564390 PISSN: 0168583X EISSN: None Source Type: Journal
DOI: 10.1016/0168-583X(95)01524-8 Document Type: Article

Times cited : (4)

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